The Probe station has a chuck that can support up to 6" wafers with very fine x, y and angular movement. The top microscope allows the correct alignment of the probes with the devices under test. Up to four probes are available, two of them with triaxial cable for extremely precise electrical measurement; the other two have coaxial connections. The Probe station has a soft contact tool that allows a semi-automatic movement to contact the probe tips to the devices without putting too much pressure.
Probe station with puck controlled air-bearing stage:
- 180 x 230 mm (7.1 x 9.1 in) XY total stage movement
- 25 x 25 mm micrometer fine stage movement
- +/- 5 degree fine chuck Theta rotation
- Dedicated 25 mm fine platen height adjustment
- Stable microscope bridge mount
- Vibration absorbing base